Speaker Information

Abstract

In recent years, advanced wireless communication systems require extremely high RF performances and miniaturization of filters for using either discrete devices or integrating into RFFE modules. Unlike semiconductor industry, filter industry has been dominated by IDM (Integrated Device Manufacturer) rather than the independent foundry. However, tendency toward RFFE modules in 5G mobile phones and beyond, the specialized filter foundry is playing and growing an important role in developing disruptive technologies and manufacturing high volume chips for TF-SAW wafer suppliers, process equipment makers and fabless RFFE modules makers. For integration into RFFE modules, thin film Surface Acoustic Wave (TF-SAW) filter has been paid highly attention because of its inherent natures of high Q, low TCF, high coupling coefficients, and high-power handling capability and so on. TF-SAW generally represents piezoelectric wafer, LT or LN where thickness around from 10 micrometers to 400 nanometers bonded to higher elastic constant supporting wafer. In this presentation, several state-of-the-art foundry processes and different types of TF-SAWs are presented for characterizing the parameters of each type of TF-SAW wafer. Along with introduction of process technologies, we also present the design rules and guide of foundry process design kit for filter designers. Most filter designs take several iterations to develop final devices which turnover time takes too long. To shorten the design cycle time, we present unique AI-driven PDK process flow to support filter designers. We also dive into the presentation of on-wafer level testing of reliability and power handling and wafer level packaging technologies of TF-SAW for high volume manufacturing. In addition, for above 3 Ghz filter, grooved and buried IDT electrode fabrication process is also presented.

Speaker Biography

Hyung Kook Yang is the founder and Chief Executive Officer at SAWNICS, Inc., Korea since 2001. Prior to founding SAWNICS, he was a senior researcher at Korea Electronic Technology Institute (KETI), Korea where he was involved in developments of new materials of SAW filters such as thin film ZnO, SiO2, SiN, Diamond like Carbon and RF SAW & Duplexers from 1994 to 2001. From 1992 to 1994, he was a research engineer at Daewoo Electronic Component Co. Ltd. His research was to develop thin film materials and SAW filter for TV & network applications. After he founded SAWNICS in 2001, he led the company listed in Korean Stock Market (KOSDAQ) successfully. He has authored more than 30 journals and conferences papers.

Education:

• B.S degree in Materials Science & Engineering from Pusan National University, Pusan, Korea
• M.S degree in Materials Engineering from Youngstown State University, USA
• Ph.D degree in Materials Engineering from Pusan National University

Key Achievements:

• Founded and led SAWNICS to successful KOSDAQ listing
• Pioneer in TF-SAW foundry services and manufacturing
• Extensive research in thin film materials for SAW applications
• Author of 30+ technical publications